JPS6141237Y2 - - Google Patents
Info
- Publication number
- JPS6141237Y2 JPS6141237Y2 JP19055282U JP19055282U JPS6141237Y2 JP S6141237 Y2 JPS6141237 Y2 JP S6141237Y2 JP 19055282 U JP19055282 U JP 19055282U JP 19055282 U JP19055282 U JP 19055282U JP S6141237 Y2 JPS6141237 Y2 JP S6141237Y2
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- boat
- cassette
- wafers
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 109
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000000428 dust Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000452 restraining effect Effects 0.000 description 2
- 208000037998 chronic venous disease Diseases 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
- Discharge By Other Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19055282U JPS5993140U (ja) | 1982-12-15 | 1982-12-15 | ウエ−ハ移し替え装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19055282U JPS5993140U (ja) | 1982-12-15 | 1982-12-15 | ウエ−ハ移し替え装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5993140U JPS5993140U (ja) | 1984-06-25 |
| JPS6141237Y2 true JPS6141237Y2 (en]) | 1986-11-25 |
Family
ID=30410551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19055282U Granted JPS5993140U (ja) | 1982-12-15 | 1982-12-15 | ウエ−ハ移し替え装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5993140U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0530362Y2 (en]) * | 1985-02-07 | 1993-08-03 |
-
1982
- 1982-12-15 JP JP19055282U patent/JPS5993140U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5993140U (ja) | 1984-06-25 |
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